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Micromachined flow sensors by using a piezoresistive cantilever paddle

Su, Y, Evans, A G R, Brunnschweiler, A and Ensell, G J (1996) Micromachined flow sensors by using a piezoresistive cantilever paddle

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Published date: September 1996
Additional Information: Proceedings of the 26th ESSDERC, Bologna, Italy.
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252819
ISBN: 2-86332-196-X
PURE UUID: b209e87b-df7d-4893-8dce-367c5e3c0593

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Date deposited: 23 Mar 2000
Last modified: 18 Jul 2017 10:01

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Author: Y Su
Author: A G R Evans
Author: A Brunnschweiler
Author: G J Ensell

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