Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope


Su, Y, Evans, A G R, Brunnschweiler, A, Ensell, G J and Koch, M (1996) Fabrication of improved piezoresistive Si cantilever probe for the atomic force microscope

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Item Type: Other
Additional Information: Proceedings of Eurosensors X, Leuven, Belgium.
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252820
Date :
Date Event
September 1996Published
Date Deposited: 23 Mar 2000
Last Modified: 17 Apr 2017 23:29
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252820

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