Garner, D M, Ensell, G J, Bonar, J, Blackburn, A, Udrea, F, Lim, H T, Popescu, A, Hemment, P L F and Milne, W I (1999) The fabrication of a partial SOI substrate.
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Published date: 1999
Additional Information:
Proceedings of the ninth international symposium on silicon-on-insulator technology and devices. Chapter: 54
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252829
URI: http://eprints.soton.ac.uk/id/eprint/252829
PURE UUID: 86f8b9b3-7885-48f1-a1dd-9b7aca4b4cf1
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Date deposited: 23 Mar 2000
Last modified: 10 Dec 2021 20:30
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Contributors
Author:
D M Garner
Author:
G J Ensell
Author:
J Bonar
Author:
A Blackburn
Author:
F Udrea
Author:
H T Lim
Author:
A Popescu
Author:
P L F Hemment
Author:
W I Milne
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