Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM


Sehr, H, Evans, A G R, Brunnschweiler, A and Ensell, G J (2000) Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM

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Item Type: Other
Additional Information: Organisation: Proceedings of SPIE, Design, Test, Integration and Packaging of MEMS/MOEMS, Paris France, 9 -11 May
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252840
Date :
Date Event
May 2000Published
Date Deposited: 05 Jul 2001
Last Modified: 17 Apr 2017 23:29
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252840

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