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Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM

Sehr, H, Evans, A G R, Brunnschweiler, A and Ensell, G J (2000) Design and Frabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM

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Published date: May 2000
Additional Information: Organisation: Proceedings of SPIE, Design, Test, Integration and Packaging of MEMS/MOEMS, Paris France, 9 -11 May
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252840
URI: http://eprints.soton.ac.uk/id/eprint/252840
PURE UUID: 72fe087c-4aeb-4237-a5cf-1c2d49a22d0c

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Date deposited: 05 Jul 2001
Last modified: 18 Jul 2017 10:01

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Contributors

Author: H Sehr
Author: A G R Evans
Author: A Brunnschweiler
Author: G J Ensell

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