Regrowth behaviour of SiGe/Si structures formed by Ge+ Ion implantation and post amorphisation
Regrowth behaviour of SiGe/Si structures formed by Ge+ Ion implantation and post amorphisation
Zhang, J.R.
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Wilson, R.J.
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Hemment, P.L.F.
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Claverie, A.
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Cristiano, F.
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Salles, P.
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Wen, J.Q.
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Evans, J.H.
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Peaker, A.R.
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Parker, G.J.
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1993
Zhang, J.R.
cab0d6db-ae25-4da3-b8b0-e330b7cc1035
Wilson, R.J.
69a755c3-e55d-47b5-8e88-c0265a1502ff
Hemment, P.L.F.
94618b9c-dba6-4cf6-b4d9-8770e7081532
Claverie, A.
64ffaaf8-2669-4a53-957a-233a50d8baef
Cristiano, F.
d653404d-82c2-44a0-a58c-b84dc4244d91
Salles, P.
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Wen, J.Q.
c1cbd331-2499-4525-b076-ea53e97feea9
Evans, J.H.
27043671-3488-44a9-8519-65f667fd1abb
Peaker, A.R.
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Parker, G.J.
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Zhang, J.R., Wilson, R.J., Hemment, P.L.F., Claverie, A., Cristiano, F., Salles, P., Wen, J.Q., Evans, J.H., Peaker, A.R. and Parker, G.J.
(1993)
Regrowth behaviour of SiGe/Si structures formed by Ge+ Ion implantation and post amorphisation.
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Published date: 1993
Additional Information:
Organisation: E-MRS 1993 Spring Meeting, Symposium GIV.6.
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252849
URI: http://eprints.soton.ac.uk/id/eprint/252849
PURE UUID: 4dd57157-e656-41d2-b750-4a108e7af943
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Date deposited: 24 Mar 2000
Last modified: 10 Dec 2021 20:29
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Contributors
Author:
J.R. Zhang
Author:
R.J. Wilson
Author:
P.L.F. Hemment
Author:
A. Claverie
Author:
F. Cristiano
Author:
P. Salles
Author:
J.Q. Wen
Author:
J.H. Evans
Author:
A.R. Peaker
Author:
G.J. Parker
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