Bonar, J M, Parker, G J, Gregory, H J, Xin, J and Ashburn, P (1996) Selective Silicon and Silicon-Germanium Grown by LPCVD.
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Published date: September 1996
Additional Information:
Organisation: Engineering Materials Post-Graduate Conference Chilworth Manor, Southampton 16 - 17 September 1996
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252854
URI: http://eprints.soton.ac.uk/id/eprint/252854
PURE UUID: 46e15d87-19e2-43c8-8623-9d09a76721b3
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Date deposited: 24 Mar 2000
Last modified: 10 Dec 2021 20:30
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Contributors
Author:
J M Bonar
Author:
G J Parker
Author:
H J Gregory
Author:
J Xin
Author:
P Ashburn
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