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Selective Silicon and Silicon-Germanium Grown by LPCVD

Selective Silicon and Silicon-Germanium Grown by LPCVD
Selective Silicon and Silicon-Germanium Grown by LPCVD
Bonar, J M
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Parker, G J
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Gregory, H J
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Xin, J
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Ashburn, P
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Bonar, J M
5ee6b25a-3e67-4a6d-9854-5e1e079d50b8
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Gregory, H J
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Xin, J
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Ashburn, P
68cef6b7-205b-47aa-9efb-f1f09f5c1038

Bonar, J M, Parker, G J, Gregory, H J, Xin, J and Ashburn, P (1996) Selective Silicon and Silicon-Germanium Grown by LPCVD.

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More information

Published date: September 1996
Additional Information: Organisation: Engineering Materials Post-Graduate Conference Chilworth Manor, Southampton 16 - 17 September 1996
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252854
URI: http://eprints.soton.ac.uk/id/eprint/252854
PURE UUID: 46e15d87-19e2-43c8-8623-9d09a76721b3

Catalogue record

Date deposited: 24 Mar 2000
Last modified: 10 Dec 2021 20:30

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Contributors

Author: J M Bonar
Author: G J Parker
Author: H J Gregory
Author: J Xin
Author: P Ashburn

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