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Selective Silicon and Silicon-Germanium Grown by LPCVD

Bonar, J M, Parker, G J, Gregory, H J, Xin, J and Ashburn, P (1996) Selective Silicon and Silicon-Germanium Grown by LPCVD

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Published date: September 1996
Additional Information: Organisation: Engineering Materials Post-Graduate Conference Chilworth Manor, Southampton 16 - 17 September 1996
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 252854
URI: http://eprints.soton.ac.uk/id/eprint/252854
PURE UUID: 46e15d87-19e2-43c8-8623-9d09a76721b3

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Date deposited: 24 Mar 2000
Last modified: 18 Jul 2017 10:01

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Contributors

Author: J M Bonar
Author: G J Parker
Author: H J Gregory
Author: J Xin
Author: P Ashburn

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