Parker, G J (1990) Thick Selective Silicon Epitaxial Growth by LPCVD from Pure Silane.
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Published date: July 1990
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252964
URI: http://eprints.soton.ac.uk/id/eprint/252964
PURE UUID: d9b60b48-8ef0-46e7-afc6-34db263143e3
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Date deposited: 14 Apr 2000
Last modified: 10 Dec 2021 20:31
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Author:
G J Parker
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