Thick Selective Silicon Epitaxial Growth by LPCVD from Pure Silane


Parker, G J (1990) Thick Selective Silicon Epitaxial Growth by LPCVD from Pure Silane

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252964
Date :
Date Event
July 1990Published
Date Deposited: 14 Apr 2000
Last Modified: 17 Apr 2017 23:27
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252964

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