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Thick Selective Silicon Epitaxial Growth by LPCVD from Pure Silane

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Citation

Parker, G J (1990) Thick Selective Silicon Epitaxial Growth by LPCVD from Pure Silane

More information

Published date: July 1990
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252964
URI: http://eprints.soton.ac.uk/id/eprint/252964
PURE UUID: d9b60b48-8ef0-46e7-afc6-34db263143e3

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Date deposited: 14 Apr 2000
Last modified: 18 Jul 2017 10:00

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Contributors

Author: G J Parker

University divisions

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