Selective Silicon Epitaxy without Chlorine Chemistry


Parker, G J and Starbuck, C M K (2000) Selective Silicon Epitaxy without Chlorine Chemistry

Download

Full text not available from this repository.

Item Type: Other
ISBNs: 0854323821 (print)
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252965
Date :
Date Event
14 April 2000Published
Date Deposited: 14 Apr 2000
Last Modified: 17 Apr 2017 23:27
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252965

Actions (login required)

View Item View Item