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A New Semiconductor Depisition System

Parker, G J and Starbuck, C M K (1991) A New Semiconductor Depisition System

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Published date: 1991
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252966
ISBN: 0854323821
PURE UUID: e074ae76-81c8-409d-8bfd-cf480059d03f

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Date deposited: 14 Apr 2000
Last modified: 18 Jul 2017 10:00

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Author: G J Parker
Author: C M K Starbuck

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