LPCVD Growth of Silicon-Germanium for Device Applications

Bonar, J M, Parker, G J, Hamel, J S and Ashburn, P (1994) LPCVD Growth of Silicon-Germanium for Device Applications.

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Published date: 1994

Organisations: Nanoelectronics and Nanotechnology

Local EPrints ID: 252967

URI: http://eprints.soton.ac.uk/id/eprint/252967

ISBN: 0854325255

PURE UUID: decbdec2-8734-4fbf-837c-c28b75e3f419

Date deposited: 14 Apr 2000

Last modified: 10 Dec 2021 20:31

Author: J M Bonar

Author: G J Parker

Author: J S Hamel

Author: P Ashburn

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