Johnston, I R and Parker, G J (1996) Wafer Etching Creates Silicon Waveguides.
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Published date: July 1996
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252968
URI: http://eprints.soton.ac.uk/id/eprint/252968
PURE UUID: f014c6b9-5784-4efa-b9df-3d1701cca81d
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Date deposited: 14 Apr 2000
Last modified: 10 Dec 2021 20:31
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Contributors
Author:
I R Johnston
Author:
G J Parker
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