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Wafer Etching Creates Silicon Waveguides

Wafer Etching Creates Silicon Waveguides
Wafer Etching Creates Silicon Waveguides
Johnston, I R
dd992ee6-85bc-4adf-b044-a80dde74f65b
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Johnston, I R
dd992ee6-85bc-4adf-b044-a80dde74f65b
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d

Johnston, I R and Parker, G J (1996) Wafer Etching Creates Silicon Waveguides.

Record type: Other

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More information

Published date: July 1996
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252968
URI: http://eprints.soton.ac.uk/id/eprint/252968
PURE UUID: f014c6b9-5784-4efa-b9df-3d1701cca81d

Catalogue record

Date deposited: 14 Apr 2000
Last modified: 10 Dec 2021 20:31

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Contributors

Author: I R Johnston
Author: G J Parker

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