Hollands, J and Parker, G J (1997) Epitaxial Machine Yields Quality Doped Polysilicon.
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Published date: February 1997
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252970
URI: http://eprints.soton.ac.uk/id/eprint/252970
PURE UUID: de2f73d3-7b10-4cb7-af16-e5a9197f5d95
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Date deposited: 14 Apr 2000
Last modified: 10 Dec 2021 20:31
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Contributors
Author:
J Hollands
Author:
G J Parker
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