Epitaxial Machine Yields Quality Doped Polysilicon


Hollands, J and Parker, G J (1997) Epitaxial Machine Yields Quality Doped Polysilicon

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252970
Date :
Date Event
February 1997Published
Date Deposited: 14 Apr 2000
Last Modified: 17 Apr 2017 23:27
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252970

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