The University of Southampton
University of Southampton Institutional Repository

Epitaxial Machine Yields Quality Doped Polysilicon

Hollands, J and Parker, G J (1997) Epitaxial Machine Yields Quality Doped Polysilicon

Record type: Other

Full text not available from this repository.

More information

Published date: February 1997
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 252970
PURE UUID: de2f73d3-7b10-4cb7-af16-e5a9197f5d95

Catalogue record

Date deposited: 14 Apr 2000
Last modified: 18 Jul 2017 10:00

Export record


Author: J Hollands
Author: G J Parker

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.