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Epitaxial Machine Yields Quality Doped Polysilicon

Epitaxial Machine Yields Quality Doped Polysilicon
Epitaxial Machine Yields Quality Doped Polysilicon
Hollands, J
70003dbc-693b-4bc0-b6ea-08391933e487
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Hollands, J
70003dbc-693b-4bc0-b6ea-08391933e487
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d

Hollands, J and Parker, G J (1997) Epitaxial Machine Yields Quality Doped Polysilicon.

Record type: Other

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More information

Published date: February 1997
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252970
URI: http://eprints.soton.ac.uk/id/eprint/252970
PURE UUID: de2f73d3-7b10-4cb7-af16-e5a9197f5d95

Catalogue record

Date deposited: 14 Apr 2000
Last modified: 10 Dec 2021 20:31

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Contributors

Author: J Hollands
Author: G J Parker

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