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Epitaxial Machine Yields Quality Doped Polysilicon

Record type: Other

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Citation

Hollands, J and Parker, G J (1997) Epitaxial Machine Yields Quality Doped Polysilicon

More information

Published date: February 1997
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252970
URI: http://eprints.soton.ac.uk/id/eprint/252970
PURE UUID: de2f73d3-7b10-4cb7-af16-e5a9197f5d95

Catalogue record

Date deposited: 14 Apr 2000
Last modified: 18 Jul 2017 10:00

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Contributors

Author: J Hollands
Author: G J Parker

University divisions


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