A Highly Versatile UHV Compatible LPCVD Epi-Reactor
A Highly Versatile UHV Compatible LPCVD Epi-Reactor
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
June 1998
Parker, G J
b140c5a5-94c4-44f3-95a3-c5054a9fe38d
Parker, G J
(1998)
A Highly Versatile UHV Compatible LPCVD Epi-Reactor.
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Published date: June 1998
Additional Information:
Organisation: VacSemi1998, Edinburgh
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 252974
URI: http://eprints.soton.ac.uk/id/eprint/252974
PURE UUID: 9210defd-1fc3-48a6-a9b7-4320097929be
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Date deposited: 14 Apr 2000
Last modified: 10 Dec 2021 20:31
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Author:
G J Parker
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