Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers
Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers
Tenbroek, B M
d7af4b47-9b03-4a16-bac2-f30d4c063643
Whiting, G
1deb79c8-bdfd-42ad-88bf-ff32d281ff23
Lee, M S L
bafc771f-3562-4a77-a7cc-20326d2ba792
Edwards, C F
abf3541b-e757-47ca-a5dd-3a6e65e75d5d
Redman-White, W
d5376167-c925-460f-8e9c-13bffda8e0bf
Uren, M J
a01d904d-14a4-42f0-a027-631e4e37d4bf
Bunyan, R J T
d9a64ca6-7cb9-4eba-8afa-294fe386aed0
September 1997
Tenbroek, B M
d7af4b47-9b03-4a16-bac2-f30d4c063643
Whiting, G
1deb79c8-bdfd-42ad-88bf-ff32d281ff23
Lee, M S L
bafc771f-3562-4a77-a7cc-20326d2ba792
Edwards, C F
abf3541b-e757-47ca-a5dd-3a6e65e75d5d
Redman-White, W
d5376167-c925-460f-8e9c-13bffda8e0bf
Uren, M J
a01d904d-14a4-42f0-a027-631e4e37d4bf
Bunyan, R J T
d9a64ca6-7cb9-4eba-8afa-294fe386aed0
Tenbroek, B M, Whiting, G, Lee, M S L, Edwards, C F, Redman-White, W, Uren, M J and Bunyan, R J T
(1997)
Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers.
Record type:
Conference or Workshop Item
(Other)
This record has no associated files available for download.
More information
Published date: September 1997
Additional Information:
Organisation: Proc Electrochemical Society Meeting, Paris, France
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252998
URI: http://eprints.soton.ac.uk/id/eprint/252998
PURE UUID: 10664acf-5027-472a-85a1-37ff703494ee
Catalogue record
Date deposited: 19 Apr 2000
Last modified: 10 Dec 2021 20:31
Export record
Contributors
Author:
B M Tenbroek
Author:
G Whiting
Author:
M S L Lee
Author:
C F Edwards
Author:
W Redman-White
Author:
M J Uren
Author:
R J T Bunyan
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics