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Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers

Tenbroek, B M, Whiting, G, Lee, M S L, Edwards, C F, Redman-White, W, Uren, M J and Bunyan, R J T (1997) Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers

Record type: Conference or Workshop Item (Other)

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More information

Published date: September 1997
Additional Information: Organisation: Proc Electrochemical Society Meeting, Paris, France
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252998
URI: http://eprints.soton.ac.uk/id/eprint/252998
PURE UUID: 10664acf-5027-472a-85a1-37ff703494ee

Catalogue record

Date deposited: 19 Apr 2000
Last modified: 18 Jul 2017 10:00

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Contributors

Author: B M Tenbroek
Author: G Whiting
Author: M S L Lee
Author: C F Edwards
Author: W Redman-White
Author: M J Uren
Author: R J T Bunyan

University divisions

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