Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers


Tenbroek, B M, Whiting, G, Lee, M S L, Edwards, C F, Redman-White, W, Uren, M J and Bunyan, R J T (1997) Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers

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Item Type: Conference or Workshop Item (Other)
Additional Information: Organisation: Proc Electrochemical Society Meeting, Paris, France
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 252998
Date :
Date Event
September 1997Published
Date Deposited: 19 Apr 2000
Last Modified: 17 Apr 2017 23:27
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/252998

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