Micromachined chemical reaction system
Micromachined chemical reaction system
This paper presents a micromachined chemical reaction system, which is based on the integration of several microfluidic devices. The system is realised by anodically bonding two pumps, two flowsensors and a micromixer on top of a micromachined fluidic circuit board. The pumps are membrane pumps with piezoelectric actuation. The pumping rates are from, −220 to 490 μl/min. The flowsensors are based on the temperature difference method. The principle of the mixing/reaction chamber used for this system is diffusion because of the small value of the Reynold's number in micro-capillaries. Two fluids/chemicals join through laterally alternated inlets in order to increase the boundary surface between them. The whole system is functional and leakage through the joints does not occur. Tests have been done with ethanol, flowing through both system inlets and joining at the mixing unit.
207 - 210
Koch, M
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Schabmueller, C G J
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Evans, A G R
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Brunnschweiler, A
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Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Schabmueller, C G J
4b2bbb63-9dc2-4983-9311-6ff590fdfbae
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Koch, M, Schabmueller, C G J, Evans, A G R and Brunnschweiler, A
(1999)
Micromachined chemical reaction system.
Sensors and Actuators A: Physical, 74 (1-3), .
(doi:10.1016/S0924-4247(98)00318-5).
Abstract
This paper presents a micromachined chemical reaction system, which is based on the integration of several microfluidic devices. The system is realised by anodically bonding two pumps, two flowsensors and a micromixer on top of a micromachined fluidic circuit board. The pumps are membrane pumps with piezoelectric actuation. The pumping rates are from, −220 to 490 μl/min. The flowsensors are based on the temperature difference method. The principle of the mixing/reaction chamber used for this system is diffusion because of the small value of the Reynold's number in micro-capillaries. Two fluids/chemicals join through laterally alternated inlets in order to increase the boundary surface between them. The whole system is functional and leakage through the joints does not occur. Tests have been done with ethanol, flowing through both system inlets and joining at the mixing unit.
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e-pub ahead of print date: 23 August 1999
Additional Information:
Sensors and Actuators A: Physical
Volume 74, Issues 1–3, 20 April 1999, Pages 207-210
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 253440
URI: http://eprints.soton.ac.uk/id/eprint/253440
ISSN: 0924-4247
PURE UUID: cecc4f32-beae-4351-992a-0c85ddb474a2
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Date deposited: 19 Jun 2000
Last modified: 17 Mar 2024 03:56
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Contributors
Author:
M Koch
Author:
C G J Schabmueller
Author:
A G R Evans
Author:
A Brunnschweiler
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