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A Novel Process for Deposition of Aluminium onto Sidewalls of Silicon Trenches

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Citation

Sehr, H, Evans, A G R, Brunnschweiler, A and Ensell, G J (2000) A Novel Process for Deposition of Aluminium onto Sidewalls of Silicon Trenches

More information

Published date: September 2000
Additional Information: Organisation: Micromachining and Microfabrication Process Proceeding of SPIE Technology, Micromachining and Microfabrication 2000, Santa Clara, CA
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 253444
URI: http://eprints.soton.ac.uk/id/eprint/253444
PURE UUID: e850b235-c947-4f2e-a983-9f84765dd062

Catalogue record

Date deposited: 05 Jul 2001
Last modified: 18 Jul 2017 09:57

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Contributors

Author: H Sehr
Author: A G R Evans
Author: A Brunnschweiler
Author: G J Ensell

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