Sehr, Harald, Evans, A G R, Brunnschweiler, A, Ensell, G J and Niblock, T E G (2000) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane. MME2000, , Uppsala, Sweden. 01 - 03 Oct 2000.
Record type:
Conference or Workshop Item
(Paper)
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More information
Published date: October 2000
Additional Information:
Organisation: MME 2000, Uppsala, October 1 - 3 2000
Venue - Dates:
MME2000, , Uppsala, Sweden, 2000-10-01 - 2000-10-03
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 253447
URI: http://eprints.soton.ac.uk/id/eprint/253447
PURE UUID: a0efb439-3173-40d6-a4e3-6f68bf957149
Catalogue record
Date deposited: 05 Jul 2001
Last modified: 12 Dec 2021 06:24
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Contributors
Author:
Harald Sehr
Author:
A G R Evans
Author:
A Brunnschweiler
Author:
G J Ensell
Author:
T E G Niblock
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