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Fabrication and Test of Thermal Vertical Bimorph Actuators for Movement in the Wafer Plane

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Citation

Sehr, Harald, Evans, A G R, Brunnschweiler, A, Ensell, G J and Niblock, T E G (2000) Fabrication and Test of Thermal Vertical Bimorph Actuators for Movement in the Wafer Plane

More information

Published date: October 2000
Additional Information: Organisation: MME 2000, Uppsala, October 1 - 3 2000
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 253447
URI: http://eprints.soton.ac.uk/id/eprint/253447
PURE UUID: a0efb439-3173-40d6-a4e3-6f68bf957149

Catalogue record

Date deposited: 05 Jul 2001
Last modified: 18 Jul 2017 09:57

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Contributors

Author: Harald Sehr
Author: A G R Evans
Author: A Brunnschweiler
Author: G J Ensell
Author: T E G Niblock

University divisions


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