Plucked excitation of micromachined silicon resonators
Plucked excitation of micromachined silicon resonators
A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.
1119-1120
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
Lambert, R.A.
42b5819e-e0cd-4026-a377-81b8c46f83b8
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
June 2000
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
Lambert, R.A.
42b5819e-e0cd-4026-a377-81b8c46f83b8
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S.P., Ensell, G., Lambert, R.A. and White, N.M.
(2000)
Plucked excitation of micromachined silicon resonators.
Electronics Letters, 36 (13), .
(doi:10.1049/el:20000788).
Abstract
A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.
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More information
Published date: June 2000
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 253676
URI: http://eprints.soton.ac.uk/id/eprint/253676
ISSN: 0013-5194
PURE UUID: 81613897-297a-43d7-b8f1-81323e21cbcf
Catalogue record
Date deposited: 30 Jun 2000
Last modified: 15 Mar 2024 02:46
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Contributors
Author:
S.P. Beeby
Author:
G. Ensell
Author:
R.A. Lambert
Author:
N.M. White
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