Beeby, S.P., Ensell, G., Lambert, R.A. and White, N.M.
Plucked excitation of micromachined silicon resonators
Electronics Letters, 36, (13), . (doi:10.1049/el:20000788).
Full text not available from this repository.
A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.
Actions (login required)