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Plucked excitation of micromachined silicon resonators

Plucked excitation of micromachined silicon resonators
Plucked excitation of micromachined silicon resonators
A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.
0013-5194
1119-1120
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
Lambert, R.A.
42b5819e-e0cd-4026-a377-81b8c46f83b8
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Ensell, G.
48fe0996-1c6b-4816-8bd0-0a3234d36ae8
Lambert, R.A.
42b5819e-e0cd-4026-a377-81b8c46f83b8
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, S.P., Ensell, G., Lambert, R.A. and White, N.M. (2000) Plucked excitation of micromachined silicon resonators Electronics Letters, 36, (13), pp. 1119-1120. (doi:10.1049/el:20000788).

Record type: Article

Abstract

A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.

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More information

Published date: June 2000
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 253676
URI: http://eprints.soton.ac.uk/id/eprint/253676
ISSN: 0013-5194
PURE UUID: 81613897-297a-43d7-b8f1-81323e21cbcf
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N.M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 30 Jun 2000
Last modified: 18 Jul 2017 09:56

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Contributors

Author: S.P. Beeby ORCID iD
Author: G. Ensell
Author: R.A. Lambert
Author: N.M. White ORCID iD

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