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Plucked excitation of micromachined silicon resonators

Beeby, S.P., Ensell, G., Lambert, R.A. and White, N.M. (2000) Plucked excitation of micromachined silicon resonators Electronics Letters, 36, (13), pp. 1119-1120. (doi:10.1049/el:20000788).

Record type: Article


A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.

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Published date: June 2000
Organisations: Nanoelectronics and Nanotechnology, EEE


Local EPrints ID: 253676
ISSN: 0013-5194
PURE UUID: 81613897-297a-43d7-b8f1-81323e21cbcf
ORCID for S.P. Beeby: ORCID iD
ORCID for N.M. White: ORCID iD

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Date deposited: 30 Jun 2000
Last modified: 18 Jul 2017 09:56

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Author: S.P. Beeby ORCID iD
Author: G. Ensell
Author: R.A. Lambert
Author: N.M. White ORCID iD

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