Plucked excitation of micromachined silicon resonators

Beeby, S.P., Ensell, G., Lambert, R.A. and White, N.M. (2000) Plucked excitation of micromachined silicon resonators Electronics Letters, 36, (13), pp. 1119-1120. (doi:10.1049/el:20000788).


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A mechanism for driving micro-mechanical silicon double-ended tuning fork (DETF) resonators by statically deforming and then releasing the tines is described. In this way, the structure vibrates at its natural frequency and the influence of the driving force is removed.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1049/el:20000788
ISSNs: 0013-5194 (print)
Organisations: Nanoelectronics and Nanotechnology, EEE
ePrint ID: 253676
Date :
Date Event
June 2000Published
Date Deposited: 30 Jun 2000
Last Modified: 17 Apr 2017 23:22
Further Information:Google Scholar

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