Beeby, SP, Ross, JN and White, NM (2000) Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors. Journal of Micromechanics and Microengineering, 10 (3), 322-9.
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Published date: 2000
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EEE
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Local EPrints ID: 253712
URI: http://eprints.soton.ac.uk/id/eprint/253712
ISSN: 0960-1317
PURE UUID: e3ddea1c-da50-44bc-9fbd-6e5f004b3ad0
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Date deposited: 24 Jul 2000
Last modified: 09 Jan 2022 02:45
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Author:
SP Beeby
Author:
JN Ross
Author:
NM White
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