Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors


Beeby, SP, Ross, JN and White, NM (2000) Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors Journal of Micromechanics and Microengineering, 10, (3), pp. 322-9.

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Item Type: Article
ISSNs: 0960-1317 (print)
Organisations: EEE
ePrint ID: 253712
Date :
Date Event
2000Published
Date Deposited: 24 Jul 2000
Last Modified: 17 Apr 2017 23:22
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/253712

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