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Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors

Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors
Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors
0960-1317
322-9
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, JN
0a5fe4de-ef4a-44aa-a4ff-0e985cde44c8
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, JN
0a5fe4de-ef4a-44aa-a4ff-0e985cde44c8
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP, Ross, JN and White, NM (2000) Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors. Journal of Micromechanics and Microengineering, 10 (3), 322-9.

Record type: Article

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More information

Published date: 2000
Organisations: EEE

Identifiers

Local EPrints ID: 253712
URI: http://eprints.soton.ac.uk/id/eprint/253712
ISSN: 0960-1317
PURE UUID: e3ddea1c-da50-44bc-9fbd-6e5f004b3ad0
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 24 Jul 2000
Last modified: 09 Jan 2022 02:45

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Contributors

Author: SP Beeby ORCID iD
Author: JN Ross
Author: NM White ORCID iD

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