Tenbroek, B M, Redman-White, W, Lee, M S L and Uren, M J (1996) Electrical measurement of silicon film and oxide thickness in partially depleted SOI technologies. Solid-State Electronics, 39 (7), 1011 - 1014.
Record type:
Article
This record has no associated files available for download.
More information
Published date: July 1996
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 253721
URI: http://eprints.soton.ac.uk/id/eprint/253721
ISSN: 0038-1101
PURE UUID: 7e6c62d9-12ee-43fc-a852-39f49f23c1cd
Catalogue record
Date deposited: 26 Jul 2000
Last modified: 08 Jan 2022 08:46
Export record
Contributors
Author:
B M Tenbroek
Author:
W Redman-White
Author:
M S L Lee
Author:
M J Uren
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.