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Electrical measurement of silicon film and oxide thickness in partially depleted SOI technologies

Tenbroek, B M, Redman-White, W, Lee, M S L and Uren, M J (1996) Electrical measurement of silicon film and oxide thickness in partially depleted SOI technologies Solid State Electronics, 39, (7), 1011 - 1014.

Record type: Article

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Published date: July 1996
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 253721
URI: http://eprints.soton.ac.uk/id/eprint/253721
ISSN: 0038-1101
PURE UUID: 7e6c62d9-12ee-43fc-a852-39f49f23c1cd

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Date deposited: 26 Jul 2000
Last modified: 18 Jul 2017 09:56

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Contributors

Author: B M Tenbroek
Author: W Redman-White
Author: M S L Lee
Author: M J Uren

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