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Design and fabrication of a low-cost microengineered siliocn pressure sensor with linearised output

Design and fabrication of a low-cost microengineered siliocn pressure sensor with linearised output
Design and fabrication of a low-cost microengineered siliocn pressure sensor with linearised output
127-30
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Stuttle, M
aacf7906-1abb-47da-b43e-85665cc6a87f
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Stuttle, M
aacf7906-1abb-47da-b43e-85665cc6a87f
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP, Stuttle, M and White, NM (2000) Design and fabrication of a low-cost microengineered siliocn pressure sensor with linearised output IEE Proceedings - Science, Measurement and Technology, 147, (3), pp. 127-30.

Record type: Article

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Published date: 2000
Organisations: EEE

Identifiers

Local EPrints ID: 254081
URI: http://eprints.soton.ac.uk/id/eprint/254081
PURE UUID: 1856604e-d1bd-4f8d-ab71-e2d47550205f
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 13 Oct 2000
Last modified: 24 Jul 2017 16:42

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Contributors

Author: SP Beeby ORCID iD
Author: M Stuttle
Author: NM White ORCID iD

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