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Design and fabrication of a low-cost microengineered silicon pressure sensor with linearised output

Design and fabrication of a low-cost microengineered silicon pressure sensor with linearised output
Design and fabrication of a low-cost microengineered silicon pressure sensor with linearised output
The design and fabrication of a capacitive pressure sensor comprising two microengineered silicon wafers fusion-bonded together to provide a relatively low-cost pressure sensor is described. The sensor produces a capacitance change of around 100 pF for an applied pressure of eight bar. The capacitance change is measured using a charge redistribution technique. The sensor has been designed to enable subsequent linearisation within a microcontroller. The same microcontroller is also used to calibrate the device, implement a successive approximation register within the charge redistribution circuit, and drive an LCD resulting in an elegant and potentially low-cost system.
127-130
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Stuttle, M.
aacf7906-1abb-47da-b43e-85665cc6a87f
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Stuttle, M.
aacf7906-1abb-47da-b43e-85665cc6a87f
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, S.P., Stuttle, M. and White, N.M. (2000) Design and fabrication of a low-cost microengineered silicon pressure sensor with linearised output. IEE Proceedings - Science, Measurement and Technology, 147 (3), 127-130. (doi:10.1049/ip-smt:20000355).

Record type: Article

Abstract

The design and fabrication of a capacitive pressure sensor comprising two microengineered silicon wafers fusion-bonded together to provide a relatively low-cost pressure sensor is described. The sensor produces a capacitance change of around 100 pF for an applied pressure of eight bar. The capacitance change is measured using a charge redistribution technique. The sensor has been designed to enable subsequent linearisation within a microcontroller. The same microcontroller is also used to calibrate the device, implement a successive approximation register within the charge redistribution circuit, and drive an LCD resulting in an elegant and potentially low-cost system.

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Published date: May 2000
Organisations: EEE

Identifiers

Local EPrints ID: 254081
URI: https://eprints.soton.ac.uk/id/eprint/254081
PURE UUID: 1856604e-d1bd-4f8d-ab71-e2d47550205f
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N.M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 13 Oct 2000
Last modified: 20 Jul 2019 01:24

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Contributors

Author: S.P. Beeby ORCID iD
Author: M. Stuttle
Author: N.M. White ORCID iD

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