Combined thick-film PZT/micromachined silicon accelerometer with self-test
Combined thick-film PZT/micromachined silicon accelerometer with self-test
577-580
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, N J
00695728-6280-4d06-a943-29142f2547c9
August 2000
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, N J
00695728-6280-4d06-a943-29142f2547c9
Beeby, SP, White, NM and Grabham, N J
(2000)
Combined thick-film PZT/micromachined silicon accelerometer with self-test.
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Conference or Workshop Item
(Other)
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Published date: August 2000
Additional Information:
Organisation: Proceedings of Eurosensors 2000
Organisations:
EEE
Identifiers
Local EPrints ID: 254084
URI: http://eprints.soton.ac.uk/id/eprint/254084
PURE UUID: 813ad2aa-30ae-4272-82d9-1bde243f4167
Catalogue record
Date deposited: 21 Mar 2002
Last modified: 11 Dec 2021 03:31
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Contributors
Author:
SP Beeby
Author:
NM White
Author:
N J Grabham
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