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Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms

Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms
Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms
0924-4247
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, SP and White, NM (2001) Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms Sensors and Actuators A: Physical

Record type: Article

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More information

Published date: 2001
Organisations: EEE

Identifiers

Local EPrints ID: 254108
URI: http://eprints.soton.ac.uk/id/eprint/254108
ISSN: 0924-4247
PURE UUID: fe9905e1-c213-48aa-99a3-474132c1ccc9
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 19 Oct 2000
Last modified: 18 Jul 2017 09:54

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Contributors

Author: SP Beeby ORCID iD
Author: NM White ORCID iD

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