Mechanical design of micromachined silicon resonators

Beeby, S P and Tudor, M J (1998) Mechanical design of micromachined silicon resonators. White, N M (ed.) Eurosensors XII. pp. 385-8 .

Record type: Conference or Workshop Item (Other)

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More information

Published date: 1998

Additional Information: Proceedings 12th European Conference on Solida State Transducers (Eurosensors XII) Organisation: IOP Address: Bristol

Venue - Dates: Eurosensors XII, 1998-09-01

Organisations: EEE

Local EPrints ID: 254119

URI: http://eprints.soton.ac.uk/id/eprint/254119

ISBN: 07503 05959

PURE UUID: 07903200-4602-48d4-bf3b-3477711a10f9

ORCID for S P Beeby:

orcid.org/0000-0002-0800-1759

ORCID for M J Tudor:

orcid.org/0000-0003-1179-9455

ORCID for N M White:

orcid.org/0000-0003-1532-6452

Date deposited: 11 Jul 2002

Last modified: 06 Mar 2024 02:35

Author: S P Beeby

Author: M J Tudor

Editor: N M White

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