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Mechanical design of micromachined silicon resonators

Beeby, S P and Tudor, M J, (1998) Mechanical design of micromachined silicon resonators White, N M (ed.) At Eurosensors XII. , pp. 385-8.

Record type: Conference or Workshop Item (Other)

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Published date: 1998
Additional Information: Proceedings 12th European Conference on Solida State Transducers (Eurosensors XII) Organisation: IOP Address: Bristol
Venue - Dates: Eurosensors XII, 1998-01-01
Organisations: EEE


Local EPrints ID: 254119
ISBN: 07503 05959
PURE UUID: 07903200-4602-48d4-bf3b-3477711a10f9
ORCID for S P Beeby: ORCID iD
ORCID for N M White: ORCID iD

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Date deposited: 11 Jul 2002
Last modified: 18 Jul 2017 09:54

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Author: S P Beeby ORCID iD
Author: M J Tudor
Editor: N M White ORCID iD

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