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Mechanical design of micromachined silicon resonators

Mechanical design of micromachined silicon resonators
Mechanical design of micromachined silicon resonators
07503 05959
385-8
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, S P and Tudor, M J, (1998) Mechanical design of micromachined silicon resonators White, N M (ed.) At Eurosensors XII. , pp. 385-8.

Record type: Conference or Workshop Item (Other)

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More information

Published date: 1998
Additional Information: Proceedings 12th European Conference on Solida State Transducers (Eurosensors XII) Organisation: IOP Address: Bristol
Venue - Dates: Eurosensors XII, 1998-01-01
Organisations: EEE

Identifiers

Local EPrints ID: 254119
URI: http://eprints.soton.ac.uk/id/eprint/254119
ISBN: 07503 05959
PURE UUID: 07903200-4602-48d4-bf3b-3477711a10f9
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 11 Jul 2002
Last modified: 18 Jul 2017 09:54

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Contributors

Author: S P Beeby ORCID iD
Author: M J Tudor
Editor: N M White ORCID iD

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