Thick-film printing of PZT onto silicon for micromechanical applications
Thick-film printing of PZT onto silicon for micromechanical applications
78-81
Harris, N R
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Beeby, S P
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White, N M
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Koch, M
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Evans, A G R
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June 1998
Harris, N R
237cfdbd-86e4-4025-869c-c85136f14dfd
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Koch, M
afb525c3-6353-4bac-93f6-a77de2881db7
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Harris, N R, Beeby, S P, White, N M, Koch, M and Evans, A G R
(1998)
Thick-film printing of PZT onto silicon for micromechanical applications.
Proc. Micromechanics Europe (MME '98).
.
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Conference or Workshop Item
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Published date: June 1998
Venue - Dates:
Proc. Micromechanics Europe (MME '98), 1998-06-01
Organisations:
EEE
Identifiers
Local EPrints ID: 254120
URI: http://eprints.soton.ac.uk/id/eprint/254120
PURE UUID: 36572acd-d657-4532-9eea-312ebc68bb74
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Date deposited: 09 Jul 2002
Last modified: 07 Dec 2024 02:35
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Contributors
Author:
N R Harris
Author:
S P Beeby
Author:
N M White
Author:
M Koch
Author:
A G R Evans
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