Harris, N R, Beeby, S P, White, N M, Koch, M and Evans, A G R (1998) Thick-film printing of PZT onto silicon for micromechanical applications. Proc. Micromechanics Europe (MME '98). pp. 78-81 .
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Published date: June 1998
Venue - Dates:
Proc. Micromechanics Europe (MME '98), 1998-05-31
Organisations:
EEE
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Local EPrints ID: 254120
URI: http://eprints.soton.ac.uk/id/eprint/254120
PURE UUID: 36572acd-d657-4532-9eea-312ebc68bb74
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Date deposited: 09 Jul 2002
Last modified: 11 Dec 2021 03:01
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Contributors
Author:
N R Harris
Author:
S P Beeby
Author:
N M White
Author:
M Koch
Author:
A G R Evans
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