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Thick-film printing of PZT onto silicon for micromechanical applications

Harris, N R, Beeby, S P, White, N M, Koch, M and Evans, A G R (1998) Thick-film printing of PZT onto silicon for micromechanical applications At Proc. Micromechanics Europe (MME '98). , pp. 78-81.

Record type: Conference or Workshop Item (Other)

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Published date: June 1998
Venue - Dates: Proc. Micromechanics Europe (MME '98), 1998-06-01
Organisations: EEE

Identifiers

Local EPrints ID: 254120
URI: http://eprints.soton.ac.uk/id/eprint/254120
PURE UUID: 36572acd-d657-4532-9eea-312ebc68bb74
ORCID for N R Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 09 Jul 2002
Last modified: 18 Jul 2017 09:54

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Contributors

Author: N R Harris ORCID iD
Author: S P Beeby ORCID iD
Author: N M White ORCID iD
Author: M Koch
Author: A G R Evans

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