Beeby, S P and White, N M (2000) Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer. Proc. Int. Conf. in Sensors and Transducers (MTEC 2000).
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Published date: February 2000
Venue - Dates:
Proc. Int. Conf. in Sensors and Transducers (MTEC 2000), 2000-02-01
Organisations:
EEE
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Local EPrints ID: 254122
URI: http://eprints.soton.ac.uk/id/eprint/254122
PURE UUID: 1d24e137-0f30-4b04-93e2-690117e983c6
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Date deposited: 25 Oct 2000
Last modified: 11 Dec 2021 03:01
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Contributors
Author:
S P Beeby
Author:
N M White
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