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Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer

Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer
Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, S P and White, N M (2000) Micromachined silicon sensors at USITT : capacitive pressure sensor, resonant strain gauge and combined silicon/thick-film accelerometer At Proc. Int. Conf. in Sensors and Transducers (MTEC 2000).

Record type: Conference or Workshop Item (Other)

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More information

Published date: February 2000
Venue - Dates: Proc. Int. Conf. in Sensors and Transducers (MTEC 2000), 2000-02-01
Organisations: EEE

Identifiers

Local EPrints ID: 254122
URI: http://eprints.soton.ac.uk/id/eprint/254122
PURE UUID: 1d24e137-0f30-4b04-93e2-690117e983c6
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 25 Oct 2000
Last modified: 18 Jul 2017 09:54

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Contributors

Author: S P Beeby ORCID iD
Author: N M White ORCID iD

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