Combined thick-film PZT/micromachined silicon accelerometer
Combined thick-film PZT/micromachined silicon accelerometer
105-112
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, J N
c1a15701-d60d-4c32-8193-680386774a88
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
April 2000
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Ross, J N
c1a15701-d60d-4c32-8193-680386774a88
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S P, Ross, J N and White, N M
(2000)
Combined thick-film PZT/micromachined silicon accelerometer.
.
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Conference or Workshop Item
(Other)
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Published date: April 2000
Additional Information:
Ferroelectrics 2000, Cirencester UK. Organisation: Ferroelectrics 2000, Cirencester, UK.
Organisations:
EEE
Identifiers
Local EPrints ID: 254124
URI: http://eprints.soton.ac.uk/id/eprint/254124
PURE UUID: 90200e01-db15-4cba-b92f-896cea27d279
Catalogue record
Date deposited: 04 Jun 2001
Last modified: 11 Dec 2021 03:01
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Contributors
Author:
S P Beeby
Author:
J N Ross
Author:
N M White
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