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Thick-film PZT-silicon micromechanical resonator

Beeby, S P and White, N M (2000) Thick-film PZT-silicon micromechanical resonator Electronics Letters, 36, (19), pp. 1661-62.

Record type: Article

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Published date: September 2000
Additional Information: Address: London
Organisations: EEE


Local EPrints ID: 254129
ISSN: 0013-5194
PURE UUID: 4dc8ea6b-e2e9-46b9-9289-9adba22ed62c
ORCID for S P Beeby: ORCID iD
ORCID for N M White: ORCID iD

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Date deposited: 25 Oct 2000
Last modified: 18 Jul 2017 09:54

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Author: S P Beeby ORCID iD
Author: N M White ORCID iD

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