Thick-film PZT-silicon micromechanical resonator


Beeby, S P and White, N M (2000) Thick-film PZT-silicon micromechanical resonator Electronics Letters, 36, (19), pp. 1661-62.

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Item Type: Article
Additional Information: Address: London
ISSNs: 0013-5194 (print)
Organisations: EEE
ePrint ID: 254129
Date :
Date Event
September 2000Published
Date Deposited: 25 Oct 2000
Last Modified: 17 Apr 2017 23:18
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/254129

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