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Thick-film PZT-silicon micromechanical resonator

Thick-film PZT-silicon micromechanical resonator
Thick-film PZT-silicon micromechanical resonator
0013-5194
1661-62
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N M
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Beeby, S P and White, N M (2000) Thick-film PZT-silicon micromechanical resonator Electronics Letters, 36, (19), pp. 1661-62.

Record type: Article

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More information

Published date: September 2000
Additional Information: Address: London
Organisations: EEE

Identifiers

Local EPrints ID: 254129
URI: http://eprints.soton.ac.uk/id/eprint/254129
ISSN: 0013-5194
PURE UUID: 4dc8ea6b-e2e9-46b9-9289-9adba22ed62c
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N M White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 25 Oct 2000
Last modified: 18 Jul 2017 09:54

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Contributors

Author: S P Beeby ORCID iD
Author: N M White ORCID iD

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