Thick-film PZT-silicon micromechanical resonator

Beeby, S P and White, N M (2000) Thick-film PZT-silicon micromechanical resonator. Electronics Letters, 36 (19), 1661-62.

Record type: Article

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More information

Published date: September 2000

Additional Information: Address: London

Organisations: EEE

Local EPrints ID: 254129

URI: http://eprints.soton.ac.uk/id/eprint/254129

ISSN: 0013-5194

PURE UUID: 4dc8ea6b-e2e9-46b9-9289-9adba22ed62c

ORCID for S P Beeby:

orcid.org/0000-0002-0800-1759

ORCID for N M White:

orcid.org/0000-0003-1532-6452

Date deposited: 25 Oct 2000

Last modified: 09 Jan 2022 02:45

Author: S P Beeby

Author: N M White

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