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Assessment of suitability of excimer laser micro-machining for production of high aspect ratio structures in lithium niobate

Assessment of suitability of excimer laser micro-machining for production of high aspect ratio structures in lithium niobate
Assessment of suitability of excimer laser micro-machining for production of high aspect ratio structures in lithium niobate
We present the result of experimental work carried out at the European Ultraviolet Laser Facility between 13th and 20th January 1997. The object of the project Was to determine the suitability of direct Excimer Laser Ablation to engineer high aspect ratio structures in photorefractive crystalline Lithium Niobate for self-pumped wave-guiding distributed feedback applications. The interaction of crystal and light field was investigated under a comprehensive spread of conditions, varying size and shape of illuminated region, power density, frequency and number of consecutive pulses. The larger holes, eg. 150µm x 150µm, had material completely removed, which was then partially deposited in the area surrounding the hole. Reducing the dimensions of the hole, eg 10µm x 10µm, resulted in re-deposition in the hole itself, producing a dendritic morphology therein. No anisotropy with regard to crystal orientation was observed during ablation. The results show that excimer laser ablation is not immediately suitable for the above application.
Ultraviolet Laser Facility, Crete
Barry, Ian E.
9d4dcd2f-f421-480a-a470-c78722995106
Eason, Robert W.
e38684c3-d18c-41b9-a4aa-def67283b020
Barry, Ian E.
9d4dcd2f-f421-480a-a470-c78722995106
Eason, Robert W.
e38684c3-d18c-41b9-a4aa-def67283b020

Barry, Ian E. and Eason, Robert W. (1997) Assessment of suitability of excimer laser micro-machining for production of high aspect ratio structures in lithium niobate Ultraviolet Laser Facility, Crete

Record type: Monograph (Project Report)

Abstract

We present the result of experimental work carried out at the European Ultraviolet Laser Facility between 13th and 20th January 1997. The object of the project Was to determine the suitability of direct Excimer Laser Ablation to engineer high aspect ratio structures in photorefractive crystalline Lithium Niobate for self-pumped wave-guiding distributed feedback applications. The interaction of crystal and light field was investigated under a comprehensive spread of conditions, varying size and shape of illuminated region, power density, frequency and number of consecutive pulses. The larger holes, eg. 150µm x 150µm, had material completely removed, which was then partially deposited in the area surrounding the hole. Reducing the dimensions of the hole, eg 10µm x 10µm, resulted in re-deposition in the hole itself, producing a dendritic morphology therein. No anisotropy with regard to crystal orientation was observed during ablation. The results show that excimer laser ablation is not immediately suitable for the above application.

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Published date: 1997
Organisations: Optoelectronics Research Centre

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Local EPrints ID: 254439
URI: https://eprints.soton.ac.uk/id/eprint/254439
PURE UUID: b1cd2934-fd24-4385-9dd2-fbf6b48b13d5
ORCID for Robert W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

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Date deposited: 14 Mar 2001
Last modified: 06 Jun 2018 13:13

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Contributors

Author: Ian E. Barry
Author: Robert W. Eason ORCID iD

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