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Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000

Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000
Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000
Sehr, H
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Evans, A G R
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Brunnschweiler, A
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Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Sehr, H
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Evans, A G R
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A
2d39ef7c-b95e-476c-b435-316b6618a565
Kraft, M
54927621-738f-4d40-af56-a027f686b59f

Sehr, H, Evans, A G R, Brunnschweiler, A and Kraft, M (2000) Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000.

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More information

Published date: 2000
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 255773
URI: http://eprints.soton.ac.uk/id/eprint/255773
PURE UUID: af3fbeac-faca-427d-a273-d7507f31406f

Catalogue record

Date deposited: 01 May 2001
Last modified: 10 Dec 2021 20:39

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Contributors

Author: H Sehr
Author: A G R Evans
Author: A Brunnschweiler
Author: M Kraft

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