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Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000

Sehr, H, Evans, A G R, Brunnschweiler, A and Kraft, M (2000) Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000

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Published date: 2000
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 255773
URI: http://eprints.soton.ac.uk/id/eprint/255773
PURE UUID: af3fbeac-faca-427d-a273-d7507f31406f

Catalogue record

Date deposited: 01 May 2001
Last modified: 18 Jul 2017 09:51

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Contributors

Author: H Sehr
Author: A G R Evans
Author: A Brunnschweiler
Author: M Kraft

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