Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000


Sehr, H, Evans, A G R, Brunnschweiler, A and Kraft, M (2000) Design and Fabrication of a Novel Thermally Actuated Vertical Bimorph Scanner for an Integrated AFM DTIP, 2000

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Item Type: Other
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 255773
Date :
Date Event
2000Published
Date Deposited: 01 May 2001
Last Modified: 17 Apr 2017 23:14
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/255773

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