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Closed loop micromachined sensors with higher order SD-Modulators

Closed loop micromachined sensors with higher order SD-Modulators
Closed loop micromachined sensors with higher order SD-Modulators
Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (Σ∆M) type control structure. The order of the Σ∆M, and hence the noise shaping properties, is usually limited by the dynamics of the mechanical sensing element and may be insufficient for high performance applications.

This paper presents a novel approach suggesting the use of a sigma-delta modulator with an order higher than the mechanical sensing element. This is achieved by a modified cascaded (or MASH) Σ∆M loop architecture. A model of the electromechanical MASH is presented and the quantisation noise analysis is derived. Simulation results indicate nearly 30 dB increase in signal to quantisation noise ratio.
104-107
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf
Mokhtari, M.E.
0b941a88-89a5-4214-8cd1-a25b62a27dd0
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Redman-White, W.
d5376167-c925-460f-8e9c-13bffda8e0bf
Mokhtari, M.E.
0b941a88-89a5-4214-8cd1-a25b62a27dd0

Kraft, M., Redman-White, W. and Mokhtari, M.E. (2001) Closed loop micromachined sensors with higher order SD-Modulators. In Proceedings 4th Conference on Modelling and Simulation of Microsystems. pp. 104-107 .

Record type: Conference or Workshop Item (Paper)

Abstract

Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator (Σ∆M) type control structure. The order of the Σ∆M, and hence the noise shaping properties, is usually limited by the dynamics of the mechanical sensing element and may be insufficient for high performance applications.

This paper presents a novel approach suggesting the use of a sigma-delta modulator with an order higher than the mechanical sensing element. This is achieved by a modified cascaded (or MASH) Σ∆M loop architecture. A model of the electromechanical MASH is presented and the quantisation noise analysis is derived. Simulation results indicate nearly 30 dB increase in signal to quantisation noise ratio.

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More information

Published date: March 2001
Additional Information: Hilton Head Island.
Venue - Dates: 4th International Conference on Modeling and Simulation of Microsystems, Hilton Head Island, United States, 2001-03-19 - 2001-03-21
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 255782
URI: https://eprints.soton.ac.uk/id/eprint/255782
PURE UUID: 54145f17-a18b-42cb-a92c-94b7bc7321a0

Catalogue record

Date deposited: 23 Aug 2004
Last modified: 10 Apr 2019 16:30

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