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A Monolithic surface micromachined Z-axis gyroscope with digital output

Xuesong, J, Seeger, J I, Kraft, M and Boser, B E (2000) A Monolithic surface micromachined Z-axis gyroscope with digital output Symposium on VLSI Circuits, pp. 16-19.

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Published date: June 2000
Venue - Dates: Proceedings Symposium on VLSI Circuits, 2000-06-01
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 255784
PURE UUID: f7866a4d-8549-46fc-8d29-49ded6099dbc

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Date deposited: 20 Jun 2001
Last modified: 18 Jul 2017 09:51

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Author: J Xuesong
Author: J I Seeger
Author: M Kraft
Author: B E Boser

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