Xuesong, J, Seeger, J I, Kraft, M and Boser, B E (2000) A Monolithic surface micromachined Z-axis gyroscope with digital output. In Proceedings Symposium on VLSI Circuits. pp. 16-19 .
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Conference or Workshop Item
(Paper)
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Published date: June 2000
Venue - Dates:
Proceedings Symposium on VLSI Circuits, 2000-05-31
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 255784
URI: http://eprints.soton.ac.uk/id/eprint/255784
PURE UUID: f7866a4d-8549-46fc-8d29-49ded6099dbc
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Date deposited: 20 Jun 2001
Last modified: 08 Jan 2022 16:25
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Contributors
Author:
J Xuesong
Author:
J I Seeger
Author:
M Kraft
Author:
B E Boser
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