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Micromachined inertial sensors. The state of the art and a look into the future

M, Kraft (2000) Micromachined inertial sensors. The state of the art and a look into the future

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Published date: 2000
Organisations: Nanoelectronics and Nanotechnology

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Local EPrints ID: 256052
URI: http://eprints.soton.ac.uk/id/eprint/256052
PURE UUID: 466f5d9b-572f-4fa9-94b8-4f6fb428234f

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Date deposited: 11 Oct 2001
Last modified: 18 Jul 2017 09:49

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Author: Kraft M

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