Micromachined inertial sensors. The state of the art and a look into the future
Micromachined inertial sensors. The state of the art and a look into the future
M, Kraft
54927621-738f-4d40-af56-a027f686b59f
2000
M, Kraft
54927621-738f-4d40-af56-a027f686b59f
M, Kraft
(2000)
Micromachined inertial sensors. The state of the art and a look into the future.
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Published date: 2000
Organisations:
Nanoelectronics and Nanotechnology
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Local EPrints ID: 256052
URI: http://eprints.soton.ac.uk/id/eprint/256052
PURE UUID: 466f5d9b-572f-4fa9-94b8-4f6fb428234f
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Date deposited: 11 Oct 2001
Last modified: 08 Jan 2022 05:42
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Author:
Kraft M
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