Intelligent control for a micromachined tunneling accelerometer
Intelligent control for a micromachined tunneling accelerometer
738-742
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Gaura, E
1e179d97-c754-4d60-a0b5-4a6f51acbb79
2001
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Gaura, E
1e179d97-c754-4d60-a0b5-4a6f51acbb79
Kraft, M and Gaura, E
(2001)
Intelligent control for a micromachined tunneling accelerometer.
International MEMS Workshop, Singapore.
.
Record type:
Conference or Workshop Item
(Paper)
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Published date: 2001
Additional Information:
Proceedings Int MEMS Workshop (IMEMS) Singapore. Organisation: Proceedings Int MEMS Workshop (IMEMS) Singapore
Venue - Dates:
International MEMS Workshop, Singapore, 2001-01-01
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 256057
URI: http://eprints.soton.ac.uk/id/eprint/256057
PURE UUID: 7d99bdad-2b7f-46f4-86a3-1e21d375a3d1
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Date deposited: 20 Aug 2004
Last modified: 10 Dec 2021 20:41
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Contributors
Author:
M Kraft
Author:
E Gaura
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