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A comparison of approaches for the design of closed-loop micromachined accelerometers

A comparison of approaches for the design of closed-loop micromachined accelerometers
A comparison of approaches for the design of closed-loop micromachined accelerometers
163-168
Gaura, E.
1e179d97-c754-4d60-a0b5-4a6f51acbb79
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Steele, M.
d2f3813a-72c6-4b7c-9260-ebd4eddf5228
Rider, R.J.
bc2793be-2ed4-4824-be87-728f21742939
Gaura, E.
1e179d97-c754-4d60-a0b5-4a6f51acbb79
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Steele, M.
d2f3813a-72c6-4b7c-9260-ebd4eddf5228
Rider, R.J.
bc2793be-2ed4-4824-be87-728f21742939

Gaura, E., Kraft, M., Steele, M. and Rider, R.J. (1999) A comparison of approaches for the design of closed-loop micromachined accelerometers. 13th International Conference on Systems Engineering, Las Vegas, USA. pp. 163-168 .

Record type: Conference or Workshop Item (Paper)

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Published date: 1999
Venue - Dates: 13th International Conference on Systems Engineering, Las Vegas, USA, 1999-08-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 256062
URI: http://eprints.soton.ac.uk/id/eprint/256062
PURE UUID: bc072153-0421-478f-a1fc-9e14f5570c4c

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Date deposited: 28 Oct 2004
Last modified: 22 Sep 2020 16:48

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