Modelling and optimisation of micromachined silicon resonators
Modelling and optimisation of micromachined silicon resonators
44-47
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
September 1994
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S P and Tudor, M J
(1994)
Modelling and optimisation of micromachined silicon resonators.
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Published date: September 1994
Organisations:
EEE
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Local EPrints ID: 256113
URI: http://eprints.soton.ac.uk/id/eprint/256113
PURE UUID: dc6a6949-d11c-490c-ac24-17893ffa15bf
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Date deposited: 31 Oct 2001
Last modified: 11 Dec 2021 03:01
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Author:
S P Beeby
Author:
M J Tudor
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