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Modelling and optimisation of micromachined silicon resonators

Modelling and optimisation of micromachined silicon resonators
Modelling and optimisation of micromachined silicon resonators
44-47
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff

Beeby, S P and Tudor, M J (1994) Modelling and optimisation of micromachined silicon resonators. pp. 44-47 .

Record type: Conference or Workshop Item (Other)

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More information

Published date: September 1994
Organisations: EEE

Identifiers

Local EPrints ID: 256113
URI: http://eprints.soton.ac.uk/id/eprint/256113
PURE UUID: dc6a6949-d11c-490c-ac24-17893ffa15bf
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for M J Tudor: ORCID iD orcid.org/0000-0003-1179-9455

Catalogue record

Date deposited: 31 Oct 2001
Last modified: 11 Dec 2021 03:01

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Contributors

Author: S P Beeby ORCID iD
Author: M J Tudor ORCID iD

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