Beeby, S P and Tudor, M J (1995) Modelling and optimisation of micromachined silicon resonators. Journal of Micromechanics and Microengineering, 5, 103-105.
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Published date: 1995
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EEE
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Local EPrints ID: 256114
URI: http://eprints.soton.ac.uk/id/eprint/256114
ISSN: 0960-1317
PURE UUID: 57c02b8b-fb1a-408c-ad84-fb9bee663edc
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Date deposited: 31 Oct 2001
Last modified: 11 Dec 2021 03:01
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Author:
S P Beeby
Author:
M J Tudor
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