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Modelling and optimisation of micromachined silicon resonators

Modelling and optimisation of micromachined silicon resonators
Modelling and optimisation of micromachined silicon resonators
0960-1317
103-105
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S P
ba565001-2812-4300-89f1-fe5a437ecb0d
Tudor, M J
46eea408-2246-4aa0-8b44-86169ed601ff

Beeby, S P and Tudor, M J (1995) Modelling and optimisation of micromachined silicon resonators. Journal of Micromechanics and Microengineering, 5, 103-105.

Record type: Article

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Published date: 1995
Organisations: EEE

Identifiers

Local EPrints ID: 256114
URI: https://eprints.soton.ac.uk/id/eprint/256114
ISSN: 0960-1317
PURE UUID: 57c02b8b-fb1a-408c-ad84-fb9bee663edc
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 31 Oct 2001
Last modified: 06 Jun 2018 13:07

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