Modelling and optimisation of micromachined silicon resonators


Beeby, S P and Tudor, M J (1995) Modelling and optimisation of micromachined silicon resonators Journal of Micromechanics and Microengineering, 5, pp. 103-105.

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Item Type: Article
ISSNs: 0960-1317 (print)
Organisations: EEE
ePrint ID: 256114
Date :
Date Event
1995Published
Date Deposited: 31 Oct 2001
Last Modified: 17 Apr 2017 23:09
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/256114

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