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Modelling and optimisation of micromachined silicon resonators

Record type: Article

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Citation

Beeby, S P and Tudor, M J (1995) Modelling and optimisation of micromachined silicon resonators Journal of Micromechanics and Microengineering, 5, pp. 103-105.

More information

Published date: 1995
Organisations: EEE

Identifiers

Local EPrints ID: 256114
URI: http://eprints.soton.ac.uk/id/eprint/256114
ISSN: 0960-1317
PURE UUID: 57c02b8b-fb1a-408c-ad84-fb9bee663edc
ORCID for S P Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 31 Oct 2001
Last modified: 18 Jul 2017 09:48

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Contributors

Author: S P Beeby ORCID iD
Author: M J Tudor

University divisions


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